Abstract

Design and properties of a turbomolecular pump which has been conceived for optimum performance as an answer to present-day technological requirements are described. The features of the vertical unidirectional flow and the direct drive shaft of high rotational speed offer many advantages. Compact design, quiet running, high pumping speed, and compression ratio are the most important characteristics. The physical properties of the pump have been optimized and tested. The blade wheels, blade angle, and the number of stages have been calculated for optimum performance by means of a computer. The performance data obtained from tests on a series of pumps, pumping speed, compression ratio, starting time, power consumption, etc., are explained and discussed.

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