A Novel Sol-Gel Method of Preparation of the LiTaO3 Thin Film and Its Property Research

Abstract

The dielectric constant and the dielectric loss of the LiTaO3 thin film derived through the experimental method which is called the Sol-Gel method, as well as its pyroelectric constant and ferroelectric hysteresis loop are explored in the manuscript. In comparison, the dielectric constant and the dielectric loss of the annealed LiTaO3 thin film derived from Pt(111)/SiO2/Si(100) substrate are superior to which are derived from Fluorine-doped tin oxide substrate. The relationships among ferroelectric hysteresis loop and pyroelectric constant as well as temperature are measured. In room temperature, the dielectric constant of LiTaO3 film is 45 at a frequency of 10 kHz, the dielectric loss is lower 0.006 than dielectric constant, The remanent polarization is 10.71 μC·cm−2. The pyroelectric coefficient is 1.43×10−8 C·cm−2·K−1 at 62 oC. This proves that the LiTaO3 thin films with high figures of merit (FV = 0.56×10−10 C·cm·J−1, FD = 0.51×10–8 C·cm·J−1) can be used widely in thermal detectors.