Abstract
A novel graphite boat for depositing multi-layer structures by liquid phase epitaxy, simultaneously on sixteen large area substrates was developed and tested for initial experiments on InP/InGaAs alloys. The starting melts undergo aliquanting and can be either near equilibrium liqiuds or two-phase melts containing saturating solids in excess of equilibrium compositions. Special features include reservoirs for containing a suitable source of phosphorus vapor to prevent the thermal dissociation of the InP substrates. Preliminary experiments on two-layer structures of InP/InGaAs alloys simultaneously deposited on four InP substrates demonstrated the successful operation of the boat. The average layer thicknesses, and the composition in different wafers are uniform. These results promise a large throughput economical liquid phase epitaxy system for preparing multi-layered structures.
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