Abstract
We have developed a unique substrate terracing process to achieve two-dimensional arrays of high-T/sub c/ step-edge superconductor-normal metal-superconductor Josephson junctions. This process has been used to realize 3/spl times/3 and 3/spl times/6 antenna coupled arrays for direct detection of emission. An enhancement to this process incorporating a YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// base layer and a Nb/PdAu ground plane is described. This modification enabled the fabrication of arrays capacitively coupled to detector junctions for detection of emission at frequencies beyond 300 GHz. This report details the motivation, design, fabrication process, and preliminary results of several array experiments. >
Published Version
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