Abstract
A new mass-spectrometric sampling technique which can be used to study the gas component variation of gas lasers during their lifetime has been developed. The new technique includes: a new valve with an extremely small throughput; a differential pumping system which can produce a high ratio of pressure difference; a suitable procedure for keeping the background vacuum constant within the quadrupole tube. As an application of this new technique, an in situ analysis of gas components for a common-type CO2 gas laser has been performed during its lifetime (800 h). This experiment showed that the technique presented could be valuable for the lifetime study of sealed-off gas lasers.
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