Abstract

In this paper, a novel temperature sensor based on the Mach-Zehnder interferometer (MZI) has been proposed and experimentally investigated. The sensor consists of a symmetrical double-grooved structure fabricated by a high-frequency pulsed CO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> laser. Some key factors affecting the transmission spectrum, such as the writing depth and interference length, have been analyzed in detail. In addition, the temperature sensitivity of the sensor is obtained in theory, by analyzing the influences of the effective refractive index and the interference length on it. The experimental results demonstrate that the wavelength shifts linearly toward longer wavelength, which agrees with the theoretical analysis. The temperature sensitivity of 230 pm/°C with a linear correlation coefficient of 0.99 can be achieved in the temperature ranging from 20 °C to 90 °C. The repeatability of the sensor also is studied. Compared with traditional MZI sensors, the proposed sensor has a high temperature sensitivity. And it is suitable for temperature measurement applications.

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