A NOVEL LUMPED TWO DEGREES OF FREEDOM PULL-IN APPROACH TO ELECTROSTATIC TORSIONAL MICROMIRRORS

Abstract

Listen

Translate article

International Journal of Computational Engineering ScienceVol. 04, No. 03, pp. 569-572 (2003) Poster PapersNo AccessA NOVEL LUMPED TWO DEGREES OF FREEDOM PULL-IN APPROACH TO ELECTROSTATIC TORSIONAL MICROMIRRORSJ.-M. HUANG, A. Q. LIU, X. M. ZHANG and J. AHNJ.-M. HUANGSchool of Electrical & Electronics Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore Search for more papers by this author , A. Q. LIUSchool of Electrical & Electronics Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore Search for more papers by this author , X. M. ZHANGSchool of Electrical & Electronics Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore Search for more papers by this author and J. AHNSchool of Electrical & Electronics Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore Search for more papers by this author https://doi.org/10.1142/S1465876303001770Cited by:0 PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractA general theoretical model using the coupling effect between the torsion and bending is presented in this paper, and which characterizes the static properties of the electrostatic torsional micromirror, especially its pull-in effect. The pull-in effect is investigated specifically to predict pull-in voltage, pull-in angle, and pull-in displacement, which highly depend on the electrode size and position, and ratio of the bending and torsion effect of the torsion beam. The ratio of the bending and torsion effect plays a key role in the pull-in phenomena. It also determines the instability mode of torsional micromirrors dominated by either the torsion or bending effect. Then, a group of torsional micromirrors is fabricated using three-layer-polysilicon micromachining process and measured using an optical projection method to verify the static actuation relation and pull-in-effect respectively. The experimental data are processed analyzed, and the theoretical analysis is in good agreement with the experimental results.Keywords:Torsional micromirrorpull-in effectoptical MEMSMOEMS References X. M. Zhanget al., Sens. Actuators A 90, 73 (2001). Crossref, Google ScholarO. Degani and Y. Nemirovsky, J. Microelectromech. Syst. 11, 20 (2002). Crossref, Google ScholarZ. X. Xiaoet al., J. Microelectromech. Syst. 10, 561 (2001). Crossref, Google ScholarO. Deganiet al., J. Microelectromech. Syst. 7, 373 (1998). Crossref, Google ScholarJ.-M. Huanget al., Sens. Actuators A 93, 273 (2001). Crossref, Google ScholarJ.-M. Huang, A. Q. Liu and J. Ahn, Sens. Actuators A (2003). Google Scholar FiguresReferencesRelatedDetails Recommended Vol. 04, No. 03 Metrics History KeywordsTorsional micromirrorpull-in effectoptical MEMSMOEMSPDF download