A novel hollow-type XY piezoelectric positioning platform

Abstract

To enhance space efficiency and reduce the planar dimensions of the piezoelectric platform, propose an innovative three-stage flexible lever hollow XY piezoelectric platform powered by piezoelectric stack. This paper details the platform's design configuration and operational principles. Analyze and optimize the platform's static and dynamic characteristics using matrix-based compliance modeling and finite element methods. The platform measures 39 mm × 39 mm × 40 mm with a hollow diameter of 29 mm × 29 mm × 40 mm and weighs 60.12 g. An array of experiments was performed to evaluate the prototype platform's performance. Experimental results revealed that the platform's motion ranges are 30.76 μm and 29.79 μm, the cross-coupling ratios are 2.02% and 2.26%, the hysteresis ratios are approximately 5.48% and 5.56%, the displacement resolution are less than 29.3 nm and 31.4 nm, and the carrying load exceeds 1 kg, all measured in the X-axis and Y-axis respectively. Moreover, after installing a simulated laser generator load, achieved square and elliptical motion trajectories by exciting different signals. The study further highlights the successful application of the novel piezoelectric positioning platform for precise motion positioning and inspection of minute electronic components under an optical microscope, signifying its potential to enhance detection and sorting processes in the electronics industry. When compared with earlier piezoelectric positioning platforms, proposed platform not only provides a superior space utilization rate but also exhibits enhanced performance. In the future, the platform will be used for high performance scanning and optical system tracking for atomic force microscopes.