A Novel High-Speed Jet Dispenser Driven by Double Piezoelectric Stacks

Abstract

A novel bi-piezoelectric jet dispenser with a zoom mechanism is proposed to distribute adhesives rapidly. The work frequency of the new jet dispenser can reach 500 Hz. The volume of the minimum dot is about 25 nL, and the volume error among dots is not more than ±10%. The dot size can be controlled by adjusting the driving voltage of the piezoelectric stack, filling pressure, and the opening time of the valve. Subsystem physical models of the jet valve are presented on the basis of the bi-piezoelectric principle and the zoom mechanism, which involves an electromechanical model, dynamic model, and fluid–solid coupling model. Based on these physical models, a coupled mechanical–electrical fluid simulation model is established, which can be simulated. The simulation results of the multiphysics-coupled model are in accordance with the experiment. The coupling model will develop a reliable simulating platform for high-speed fluid jet. The effectiveness of the bi-piezoelectric method and models is confirmed, and it will provide a new technology for microelectronics packaging.