Abstract
Abstract An xy double-axis surface micro-machined single side electrostatic servo accelerometer has been proposed. This sensor has a DOF (degree of freedom of motion) separation mechanism, which effectively eliminates cross-axis sensitivity. The DOF separation can be attained by the gimbal suspension mechanism introduction, as well as the counter modal mode detecting electrodes configuration principle, deduced from both the loop and node locations based on the FEM normal mode analysis for the vibrational modes of interest. By using the above new techniques, xy acceleration sensitivity increase as well as cross-axis sensitivity suppression can be attained.
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