Abstract
Aiming at improving the Q-factor and simplifying the fabricating process of the cupped solid-state wave Gyroscope, a novel cupped solid-state wave gyroscope based on piezoelectric effect is presented in this paper. The sensor has a novel cupped metallic resonator comprises of a cone shell and eight thin flat beams. The working principle of the gyroscope is validated by FEM. Compared with conventional solid-stated gyroscopes, the novel structural features improve the Q-factor and simplify the fabricating process of the gyroscope. The prototypal gyroscope is fabricated and tested, the work mode frequency is about 3979Hz, and the Q-factor is over 8000 in atmosphere. The side-lobes in the output signal’s FFT curve validate the novel design scheme.
Published Version
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