Abstract

In order to improve time-grating sensor’s measurement accuracy, which is influenced by stability of the components, temperature and mechanical processing in precision measuring procedure. A novel compensation method based on Fourier series approach and least square is presented. With this method, the measurement error is separate into a lot of harmonics, and the optimal parameters of compensation are evaluated by least square method. The accuracy analysis certificates that time-grating sensor’s measurement error is reduced from ±14.8′′ to ±2.5′′ by applying the error compensation method, which is compensated about 80% compared with no compensation. Sensor’s accuracy is effectively improved.

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