A Novel Approach for Batch Fabrication of Bifunctional AFM-SECM Probes

Abstract

This paper presents a novel batch fabrication process for manufacturing bifunctional Scanning Electrochemical-Atomic Force Microscopy (AFM-SECM) probes with a recessed integrated ring electrode. The presented tip fabrication procedure enables the integration of a micro ring electrode at a precisely defined distance above the apex of the AFM tip. The electroactive area integrated into a scanning probe tip allows obtaining electrochemical data independently and separated from the topographical image. The tip fabrication is based upon batch processing, which provides bifunctional scanning probe tips on a wafer scale at low cost with high processing reproducibility and uniformity. Electrochemical characterization of an AFM tip-integrated ring electrode and combined electrochemical and topographical imaging using the bifunctional probe are demonstrated in this study.