Abstract
The behavior of a single frequency capacitively coupled plasma (CCP) driven by 13.56 MHz rf source is investigated using an approach that integrates a nonlinear global analytical model and experimental data. The non linear model consists of a description of the plasma bulk, based on a fluid dynamics approach coupled to a separate model of the sheath. The parameters used in the model are obtained by operating the single frequency CCP experiment (13.56 MHz) in argon at working pressures 73 to 400m torr. Experimentally measured plasma parameters such as the electron density, electron temperature, the discharge symmetry parameter as well as the rf voltage waveforms are the inputs of the theoretical model. Model results of the DC self bias and rf current for various operating pressures and powers are shown. A comparison of the outputs of the numerical results is done with the experimentally obtained values of the DC self bias and rf current. A good quantitative correspondence between them is obtained. The results presents may substantially improve the understanding of the behavior of the capacitively coupled plasma.
Highlights
In the last few decades, radio frequency discharge has found importance in the fundamental as well as in the experimental research.[1,2,3,4] There have been many studies using different configurations, among these most frequently used are capacitively coupled plasma (CCP) and inductively coupled plasma (ICP)
The discharge symmetry parameter is related to the DC self bias voltage by the following equation;[25]
We experimentally studied the behavior of geometrically asymmetric capacitively coupled plasma driven by 13.56 MHz rf sources
Summary
In the last few decades, radio frequency (rf) discharge has found importance in the fundamental as well as in the experimental research.[1,2,3,4] There have been many studies using different configurations, among these most frequently used are capacitively coupled plasma (CCP) and inductively coupled plasma (ICP). Several numerical and simulation studies have been done in the recent years, which are based on the Mussenbrocks seminal work,[15,16,17,18] few experimental reports are available that validate the predictions of the model on the DC self bias and the rms values of the rf current which are decisive parameters for the ion energy and ion flux onto the substrate.[21,22] Clearly, more experimental research is required at various gas pressures, driving voltage amplitudes as well as driving frequencies. As the operational conditions include a wide range of pressures and rf powers, we hope that this study might be beneficial for a better understanding of the dynamics of the CCP discharge.
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