The electrical asymmetry effect in a multi frequency geometrically asymmetric capacitively coupled plasma: A study by a nonlinear global model

Abstract

We investigate the electrical asymmetry effect (EAE) and the current dynamics in a geometrically asymmetric capacitively coupled radio frequency plasma driven by multiple consecutive harmonics based on a nonlinear global model. The discharge symmetry is controlled via the EAE, i.e., by varying the total number of harmonics and tuning the phase shifts (θk) between them. Here, we systematically study the EAE in a low pressure (4 Pa) argon discharge with different geometrical asymmetries driven by a multifrequency rf source consisting of 13.56 MHz and its harmonics. We find that the geometrical asymmetry strongly affects the absolute value of the DC self-bias voltage, but its functional dependence on θk is similar at different values of the geometrical asymmetry. Also, the values of the DC self-bias are enhanced by adding more consecutive harmonics. The voltage drop across the sheath at the powered and grounded electrode is found to increase/decrease, respectively, with the increase in the number of harmonics of the fundamental frequency. For the purpose of validating the model, its outputs are compared with the results obtained in a geometrically and electrically asymmetric 2f capacitively coupled plasmas experiment conducted by Schuengel et al. [J. Appl. Phys. 112, 053302 (2012)]. Finally, we study the self-excitation of nonlinear plasma series resonance oscillations and its dependence on the geometrical asymmetry as well as the phase angles between the driving frequencies.