Abstract

A niching genetic algorithm (NGA) was presented to optimize a SiC-bulk crystal growth system by PVT. The NGA based on clearing mechanism and its combination method with heat transfer model for SiC crystal growth were described in details. Then three inverse problems for optimization of growth system were carried out by NGA. Firstly, the radius of blind hole was optimized to decrease the radial temperature gradient along the substrate while the center temperature on the surface of substrate is fixed at 2500K. Secondly, insulation materials with anisotropic thermal conductivities were selected to obtain much higher growth rate as 600, 800 and 1000µm/h. Finally, the density of coils was also rearranged to minimize the temperature variation in the SiC powder. All the results were analyzed and discussed.

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