Abstract
Abstract Mechanical strain effect experiments on a 103 MHz Y-Z LiNbO3 surface acoustic waves (SAW) transducer with 3 cm electrode distance have been made. The phase shift was 40 degrees at −90 × 10−6 strain and quite linear with strain. Optimum design considerations for a SAW pressure sensor consisting of a clamped edge piezoelectric diaphragm with two sets of interdigital electrodes have been made. The optimum positions for the electrodes were determined. Deflection of the diaphragm under pressure retards the phase for one set and advances the phase for the other set. The maximum phase shift and cancellation of thermal expansion effects results by measuring the phase difference between the two sets. The maximum phase shift and cancellation of thermal expansion effects results by measuring the phase difference between the two sets.
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