Abstract
Considering the reported low outgassing rate of TiN film on stainless steel, the application of TiN coatings on stainless steel walls is a promising approach to rapid evacuation of vacuum chamber. To realize this idea, a hollow cathode discharge ion plating process was developed to coat the internal surface of a 150 mm φ × 1000 mm stainless steel tube by vertical motion of the tube. To optimize the coating of a large sample under this system, samples of TiN films on stainless steel were prepared using the same conditions as the large sample and their composition, nanoscale surface topography, crystalline orientation, outgassing rate, and hydrogen permeation rate were examined.
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