Abstract
In the present study, molybdenum-amorphous carbon coatings were prepared using an unbalanced magnetron sputtering technique with substrate temperatures between 0 and 200 °C. Microstructural examinations confirmed the formation of crystalline hexagonal diamond and graphite-like carbon as well as amorphous molybdenum-carbon phases. This study enabled the formation of a crystalline hexagonal diamond phase under the appropriate combination of unbalanced magnetron configuration and substrate temperature. It was concluded that a balance between sp2 domain size and the amount of crystalline hexagonal diamond phase was key to achieving coatings with hardness values of up to 36 GPa. In addition, it was found that increasing the substrate temperature decreased the coefficient of friction and wear rate of the coating.
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