Abstract
Linear ultrasonic motors have been of significant research interests for its excellent characteristics, but it’s hindered by complicated structure. The purpose of this paper is to design and manufacture a prototype by utilizing ANSYS software based on the analysis of mechanism. The vibrator of linear motor is composed of a three teeth rectangular medal block, two group of PZT elements which is adhered on the surface of metal block and slider. It is found that the result of FEA analysis is consistent with experiment result.
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