Abstract
A new, inexpensive, reliable, computer-controlled shutter has been designed with a modified effusion cell on the same flange for thermal evaporation in an ultrahigh vacuum system. Only 5 W are required to control the shutter open/close states with a response time of less than 0.1 s. The evaporation rate can be modulated by varying the speed of rotation of the shutter. Rotary action is obtained through a coupled magnetic field. Doping levels between maximum and minimum flux can be achieved. About 100 W are needed for 1000 °C operation. A functional modified effusion cell was constructed using an available standard pyrolytic boron nitride crucible(10 cc capacity). As an example of the capabilities of this shutter-controller system, a linear ramped profile was demonstrated.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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