Abstract
A New Procedure to Define the Zero-Field Condition and to Delineate pn-Junctions in Silicon Devices by Scanning Capacitance Microscopy
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https://doi.org/10.1016/s0026-2714(03)00293-2
Copy DOIJournal: Microelectronics and Reliability | Publication Date: Sep 1, 2003 |
Citations: 3 |
A New Procedure to Define the Zero-Field Condition and to Delineate pn-Junctions in Silicon Devices by Scanning Capacitance Microscopy
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