Abstract
Atomic Force Microscopy (AFM) plays a vital role in nanoscience and nanotechnology due to its nanoscale resolution. However, the realization of highly precise measurement for AFM is still a challenge. A main factor is the positioning accuracy of the piezoelectric scanner (PZT), affected significantly by the hysteresis of PZT. The paper reports a new dynamic polynomial fitting method modeling hysteresis to achieve the inverse model of the PZT. The inverse model is used as the feedforward input, combined with the fuzzy feedback controller proposed in our former paper, to correct the nonlinear errors induced by the hysteresis. The method is demonstrated to be effective in improving the positioning accuracy of the lateral PZT. Its accuracy can achieve 1 nm.
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