A new optimal design and analysis method based on MADM for MEMS products development

Abstract

This paper presents an optimum design method to support the total micro-electromechanical systems (MEMS) product/device optimization, and its evaluation at the con- ceptual stage itself using th em ultiple attribute decision making method. In the traditional MEMS product develop- ment cycle, simulation and design using software tools are very important due to the knowledge limitation and com- plexity in design, fabrication, and packaging processes. The available tools are time consuming and relay on trial and error to achieve an optimum solution. The proposed method simplifies the relationship between parameters of design, fabrication, materials, packaging, and the performance of the MEMS product. The methodology is explained with the help of design flow diagram and time chart. A MEMS-based radio frequency (RF) power sensor is designed and the methodology is demonstrated. The proposed sensitivity analysis method is more effective and less time consuming than traditional techniques. Sensitivity analysis is carried out by varying the thickness of the signal conductor. The results of RF power sensor with insertion loss 0.428 dB, reflection loss 25.956 and voltage standing wave ratio of 1.106 at 1.5 GHz are reported.