Abstract
The 288 m long Storage Ring of Swiss Light Source 2.0 (SLS 2.0) consists of several vacuum chambers with unique geometries. Complicated features, with many changes in the cross sections, are essential to provide the best impedance matching, and to allow synchrotron light extraction under the tight geometrical constraints. In order to speed up the commissioning time, it was decided to coat most of the vacuum chambers with non-evaporable getter (NEG) material. A new magnetron sputtering setup has been developed in Paul Scherrer Institut (PSI), where the plasma length, defined by thin solenoids, is relatively small. The solenoids are continuously travelling over the entire vacuum chambers more than hundred times per coating process with an average speed of 4 mm/s to assure the best possible thickness uniformity and to limit the cathode heat up. Flexibility provided by this solution allows to coat various vacuum vessels in one assembly. This paper will describe this NEG coating setup and show results on SLS 2.0 vacuum chambers.
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