Abstract
Thickness measurement is very critical especially in fabrication of micro and nano devices to determine the thickness of the layers. Stylus measurement is the easiest and most common technique that is being employed among the other thickness measurement methods. Micro-nano fabrication processes requires the usage of both rigid and soft materials. While thickness of a rigid material can be easily detected, thickness measurement of the soft materials presents some difficulties for standard stylus thickness measurement devices. Since the soft materials are deformed by the stylus due to the applied pressure, correct thickness measurement cannot be realized. Here, PDMS (Polydimethylsiloxane) is used as soft material for thickness measurement. By taking the replica of the soft material with liquid plastic which becomes rigid after curing, the depth can be measured easily via conventional stylus thickness measurement devices.
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