Abstract
Techniques to remove plural scattering from electron energy loss spectra (EELS) are important in bot hmicroanalysis and other quantitative applications of electron spectroscopy. The techniques used are either based on convolution, or Fourier transform deconvolution, methods, in which either the elastic scattering angular correction or both elastic and inelastic angular corrections are not included. In this work we propose a new method based on both angular and energy loss three-dimension Poisson statistics which includes elastic and inelastic mixed angular scattering correction in order to obtain more accurate quantitative analysis for EELS.The electron scattering distribution determined by angular and energy loss three-dimension Poissonstatistics is given by:where ITis the total incident electron intensity; t is the sample thickness; λi, λeand λTare inelastic , elastic and total scattering mean free paths; Si(θ) and Se(θ) are normalized single inelastic and elastic angular scattering distributions respectively, F(E) is the single scattering normalized energy loss distribution.
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