Abstract

We have investigated by high-resolution transmission electron microscopy SrTiO 3/SrRuO 3 bilayer films epitaxially grown on LaAlO 3 substrate. At the SrRuO 3/LaAlO 3 interface we frequently observe dissociated superdislocations in connection with Ruddlesden–Popper-type planar defects. These superdislocations can contribute to misfit relaxation equivalent to a perfect misfit dislocation with Burgers vector a〈1 1 0〉. The formation and the geometry of this defect arrangement is discussed in detail. The Sr-rich Ruddlesden–Popper-defect can be introduced by composition fluctuations during film deposition. It can be concluded that it can act as a source for the generation of misfit dislocations.

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