A new J.E probe for measurement of spatial profiles of power absorption in RF produced plasma.

Abstract

This paper reports an indigenously developed probe for the measurement of spatial profiles of the absorbed/generated RF power density Pabs (W/m3) in RF discharges. The technique utilizes a calibrated current (J) probe based on the Rogowski coil principle and an electric field (E) probe based on capacitive coupling, both integrated into a single probe called the J.E probe. Various aspects of the probe, such as its design, fabrication, calibration, and limitations, were resolved before it was used for obtaining axial profiles of RF power absorption/generation. Also presented are the first experimental results for the absorbed power density profiles at the fundamental (13.56MHz) and harmonic (27.12MHz) along the length of a capacitively coupled discharge. The axial scans between the powered and grounded electrode were taken at different argon gas pressures (10-800mTorr) at a fixed RF power of 10W. Detailed analysis of the results shows that even for systems with large electrode gaps, i.e., plasmas with long bulk plasma regions, practically all the fundamental power is absorbed in a narrow edge region near the powered electrode, irrespective of the pressure. Absorption is high near the RF electrode since the RF fields peak in this region. Another important conclusion is that stochastic absorption of the fundamental and harmonic generation proceeds fairly efficiently in the vicinity of the powered electrode even at high pressures. It may be mentioned that the probe technique introduced here is the first of its kind, and although there is considerable scope for miniaturization, it has, nonetheless, provided some key insights into the nature of RF power absorption in capacitive discharges.