A new explicit and analytical model for square Gate-All-Around MOSFETs with rounded corners

Abstract

The scaling of MOSFET transistors makes the use of new device geometries, such as multigate FETs, a need to solve the limitations of the conventional bulk technology. In this context we introduce an analytical model for square Gate All Around (GAA) MOSFETs with rounded corners including quantum effects. The modeling of rounded corners in GAA and FinFET devices is imperative because there are no perfectly square corners in the cross-section of real devices. In this model the 2D inversion charge distribution function (ICDF) is described analytically for devices of different sizes and for different operation regimes. The model reproduces accurately simulated data obtained with a state-of-the-art simulator that solves self-consistently the Poisson and Schrödinger equations in the devices under consideration. The analytical ICDF is used to better understand the device physics and to calculate the inversion charge centroid and the gate-to-channel capacitance for different device geometries and biases for modeling purposes.