Abstract
A high temperature tolerant microelectronic-based carbon monoxide (CO) gas sensor has been developed. The device is fabricated as a diamond diode with Pt–SnO x as the CO gas sensitive electrode. The gas sensing performance has been studied over a wide temperature range (50–500°C). The gas sensitivity of the sensor is large, fast, repeatable, and reproducible. The CO detection mechanism of the sensor was studied and attributed to the reduction of oxygen in the SnO x by CO gas, thereby increasing the oxygen vacancies in the SnO x layer of the sensor upon exposure to CO gas. Activation energy of the sensor was analyzed and found to be 1.1 kcal/mol in 1.4-Torr CO gas with 0.6-Torr oxygen as background gas. The low value of activation energy confirms the fast response and large sensitivity of the sensor for CO gas.
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