Abstract
Wide range tunable components are a key point for high frequency performances. We have developed a novel RF MEMS rotational capacitor based on surface variation and high displacement. This paper will present multiple designs with physical parameter variations for comparative test with fabricated device measurements. The goal of this work is to prove the proper operation of the devices according to fulfill target performances. The main parameters will be tunability, capacitance value, resonance frequency and finally maximal actuation voltage allowed.
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