Abstract

AbstractSAW devices are widely used as delay lines, oscillators and filters. Their characteristics are mainly determined by the SAW propagation characteristics on the piezoelectric substrate. This paper seeks to find a cut that produces better characteristics than those of the conventional Rayleigh wave. Theoretical and experimental investigations are conducted for the characteristics of leaky surface waves propagating on a quartz substrate. As a result, an extremely desirable cut is identified which is a θ = 14.7° cut from a rotated Y‐cut X‐propagation substrate. This cut has a zero temperature coefficient, the variation of the delay time is less than ±10 ppm over a wide temperature range of −20 ˜ 80°C, the propagation loss is only 2.6 × 10−3 dB/λ and the propagation velocity of about 3940 m/s is much higher than that of an ST cut. This new cut is considered to be sufficiently practical for application to various SAW devices.

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