Abstract
A new normally open valve is presented. A polydimethylsiloxane (PDMS) cavity with two microchannels were fabricated using soft lithography technology. The one end of the cavity is arc-shaped at the joint with the microchannel. A steel ball is placed into the PDMS cavity mounted on a piezoelectric substrate with an interdigital transducer (IDT). Surface acoustic wave excited by the IDT is used for driving the steel ball to the arc area, leading to blocking the inlet of the microchannel. The microvalve was then closed. The switching characteristics were experimentally demonstrated using red ink solution.
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