Abstract
We propose and demonstrate a simple and novel method to control the deflection in a suspended microstructure by using a dual current electroplating (DuCE) method. The key concept of this method is to divide the structure into two layers—a bottom layer and a top layer—and then apply respective current densities in electroplating to those two layers while all other conditions are kept the same. In addition to a flat structure, the direction of structure bending is freely controlled by virtue of the DuCE method. Cantilever Ni beams with a length of 400 µm, which were electroplated by the conventional single current electroplating method, bent downward with a deflection of 3.4 µm. On the contrary, by the DuCE method, cantilever beams with a length of 400 µm showed an almost flat structure as desired. (The current densities of the bottom layer, the top layer, and the ratio of the two current densities, are 0.15, 1.24 A dm−2, and 8.3, respectively.) Consequently, a nickel electroplated spiral structure with a length of 8600 µm was suspended flat with an end deflection of less than 0.7 µm (the ratio between the deflection and length is 0.007%). This work therefore represents the unprecedented ultra-long suspended microstructure with submicrometer deflection.
Published Version
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