Abstract
Ultra-precise reflectors in the advanced light source facilities urgently call for local slope error measurements with nano-radian precision. However, the existing methods currently utilized in the long trace profiler systems struggle to meet the requirements. In this paper, we present a weak-value amplification enhanced absolute local slope measurement scheme, in which the surface height difference between two adjacent points can be measured directly with precision on the pico-meter level. As a result, the absolute local slope measurement reaches a record precision level of 9.7 nrad (RMS) with a small lateral separation of 0.5 mm. Comparing to the existing methods, our scheme is more disturbance-resistant, more compact and cost-effective. The local curvature measuring capability is also validated with two synchronously parallel local slope measurement paths, between which the separation is set as 2mm. A local curvature measurement is obtained with precision of 3.4 × 10-6m-1 (RMS) and its corresponding slope variation is 6.8 nrad. Our method exhibits important application prospects in the field of ultra-precise surface fabrication inspection.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
