Abstract

We demonstrate a memory device, using gold nanoparticles as charge storage elements deposited at room temperature by chemical processing. The nanoparticles are deposited over a thin thermal silicon dioxide layer that insulates them from the device silicon channel. An organic insulator deposited by the Langmuir-Blodget technique at room temperature separates the aluminium gate electrode from the nanoparticles. The device exhibits significant threshold voltage shifts after application of low voltage pulses (</spl plusmn/7 V) to the gate and has non-volatile retention time characteristics.

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