Abstract
An increasing demand for surface acoustic wave filters with high performances contributes to the necessity of reducing sizes and costs. The present work proposes a multilayered structure of high-velocity layer/SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> /interdigital transducers (IDTs)/piezoelectric-single-crystal substrate to further validate the strengths of packageless devices. Resonators based on the SiN <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</sub> /SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> /IDTs(Cu)/15°Y-X LiNbO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> structure are simulated and analyzed. One-port resonators are designed, fabricated and tested on the basis of the simulation, and results validates the feasibility of no encapsulation. Finally, by using this multilayered structure, a packageless filter with a center frequency of 2.14 GHz and an ultra-small size of 0.695×0.490×0.122 mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sup> is successfully designed and realized, maintaining well-balanced performances. This work has demonstrated the strengths of packageless devices which can be obtained by utilizing the proposed multilayered structure, and may promote the development of device miniaturization. [2021-0035]
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