Abstract
A design synthesis technique based on sensitivity for Micro-Electro-Mechanical Systems (MEMS) proposed. This new technique can be called Sensitivity-Based Direct Solution Algorithm (DSA) of design synthesis for MEMS with expected performance. Design synthesis with expected performance is regarded as a reverse problem of MEMS analysis. Behavior equation group can be educed from analysis equations. This behavior equation group can be solved using any solution algorithm of non-linear equation group. Newton Iteration Method based on sensitivity is adopted. Comparing with Genetic Optimization Algorithm (GA) , computational workload of DSA is greatly decreased.
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