Abstract
A design synthesis technique based on sensitivity for Micro-Electro-Mechanical Systems (MEMS) proposed. This new technique can be called Sensitivity-Based Direct Solution Algorithm (DSA) of design synthesis for MEMS with expected performance. Design synthesis with expected performance is regarded as a reverse problem of MEMS analysis. Behavior equation group can be educed from analysis equations. Solving the behavior equation group only need L design variables, L is number of desired behaviors. This behavior equation group can be solved using any solution algorithm of non-linear equation group. Newton Iteration Method based on sensitivity is adopted. Comparing with Genetic Optimization Algorithm (GA) and Simulated Annealing Optimization Algorithm (SA), computational workload of DSA is greatly decreased. For instance, synthesis computation of a meandering resonator only needs 4 iterations (17 analyses); computational time is decreased from 7~8 hours to less than 30 seconds.
Highlights
Estimating Micro-Electro-Mechanical Systems (MEMS) are miniaturized mechanical devices and components, often integrated or interfaced with electronics and fabricated on silicon wafers
We introduce the above-mentioned analysis method and analysis tool, Simulated Nature Algorithms (SNA) design synthesis Algorithms, proposes the Direct Solution Algorithm (DSA), compare them through an engineering example, and discuss various design strategy and their development
The results show that Simulated Annealing can in some cases synthesize valid designs faster than Genetic Algorithms
Summary
Estimating Micro-Electro-Mechanical Systems (MEMS) are miniaturized mechanical devices and components, often integrated or interfaced with electronics and fabricated on silicon wafers They are systems in multi energy domains including electrical, mechanical, thermal etc. MEMS synthesis usually begins with high-level specifications that describe the expected behaviors of devices [1]. SUGAR is a good base of advanced techniques of general-purpose synthesis and optimization of MEMS devices. On the basis of SUGAR, the research group firstly developed some optimization algorithms to solve the design synthesis problem of MEMS devices. We introduce the above-mentioned analysis method and analysis tool, SNA design synthesis Algorithms, proposes the Direct Solution Algorithm (DSA), compare them through an engineering example, and discuss various design strategy and their development
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