Abstract
A Monte-Carlo electron transport algorithm is described for transmission and energy loss calculation in the 10–1000 keV energy range. The results obtained considering homogeneous targets are in good agreement with experimental results and with computation with different Monte-Carlo and semi-empirical models. Our Monte-Carlo program (VALE) allows energy loss calculations in a non-homogeneous in-depth target, like layered materials. It produces good results for the energy loss calculation in metal/silicon systems, allowing confident computations of the thermal effects produced by electron pulses in layered samples (electron beam annealing).
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
