Abstract
A Monte-Carlo electron transport algorithm is described for transmission and energy loss calculation in the 10–1000 keV energy range. The results obtained considering homogeneous targets are in good agreement with experimental results and with computation with different Monte-Carlo and semi-empirical models. Our Monte-Carlo program (VALE) allows energy loss calculations in a non-homogeneous in-depth target, like layered materials. It produces good results for the energy loss calculation in metal/silicon systems, allowing confident computations of the thermal effects produced by electron pulses in layered samples (electron beam annealing).
Published Version
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