Abstract
Practical assessment of risks for Electrostatic Discharge (ESD) failures of semiconductor devices, due to charges induced on devices in a manufacturing or repair environment of electronics has been difficult, because easily measurable parameters such as the electrostatic field and the potential of a charged surface do not directly quantify the risk. In this paper a new method of assessing the risks with induction charging of a sensitive device is presented by introducing a well-defined dummy device, which is a simple modification of the probe of DC type non-contacting electrostatic voltmeter. By placing the modified potential probe (mimicking large sensitive device) in front of charged surface, risks of ESD failure for a device due to induction charging can be assessed. The electrostatic response of the probe at different distances between charged surface and the probe has been verified by numerical model calculations.
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