Abstract
This paper presents a model for femtosecond-laser-pulse ablation of metal thin films. A femtosecond pulsed laser has a temporally short pulse that does not cause significant heat conduction in the material. This property of femtosecond laser pulse ablation makes submicron machining achievable with laser irradiation. Considering vaporization as the mechanism of the material removal, this paper utilized two-temperature model with solid-vapor phase change to numerically analyze the thermal process for femtosecond laser ablation of metal thin films. The variations of the ablation rate and ablated opening diameter with laser fluence were compared with the available experimental data. The results show that the ablated depth per pulse and squared crater diameter calculated by this model are in agreement with the experimental data.
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