Abstract
To avoid the oscillation of four unequal masses seen in previous triaxial linear gyroscopes, a modified silicon triaxial gyroscope with a rotary wheel is presented in this paper. To maintain a large sensitivity and suppress the coupling of different modes, this novel gyroscope structure is designed be perfectly symmetrical with a relatively large size of about 9.8 mm × 9.8 mm. It is available for differentially detecting three-axis angular rates simultaneously. To overcome the coupling between drive and sense modes, numerous necessary frames, beams, and anchors are delicately figured out and properly arranged. Besides, some frequency tuning and feedback mechanisms are addressed in the case of post processing after fabrication. To facilitate mode matched function, a new artificial fish swarm algorithm (AFSA) performed faster than particle swarm optimization (PSO) with a frequency split of 108 Hz. Then, by entrusting the post adjustment of the springs dimensions to the finite element method (FEM) software ANSYS, the final frequency splits can be below 3 Hz. The simulation results demonstrate that the modal frequencies in drive and different sense modes are respectively 8001.1, 8002.6, 8002.8 and 8003.3 Hz. Subsequently, different axis cross coupling effects and scale factors are also analyzed. The simulation results effectively validate the feasibility of the design and relevant theoretical calculation.
Highlights
With the development of MEMS technology, many categories of silicon micro-gyroscopes have been developed as key inertial sensors to detect angular rates
It is not enough that the four modal frequencies are matched well only by simulation, as any fabrication imperfections will definitely cause extra frequencies splits. To eliminate this deviation induced by fabrication error, the assistant stiffness trimming approach need to be developed in this design
We present a new triaxial vibratory wheel gyroscope with fully decouped functions
Summary
With the development of MEMS technology, many categories of silicon micro-gyroscopes have been developed as key inertial sensors to detect angular rates. To realize a lateral single axis gyroscope, an x-axis gyroscope with vertical drive and in-plane sensing was first proposed in 2005 [5]. Different from linear vibration gyroscopes, a new monolithic wheel type triaxial gyroscope is successfully fabricated and tested [12] Both the x- and y- axis angular rates can be detected synchronously via out-of-plane plates, whereas the z-axis measurement is performed by in-plane comb fingers. Another delicate design of monolithic triaxial gyroscope is proposed [13]. A single axis gyroscope with fully symmetrical decoupled style is proposed to realize the bidirectional decoupling between drive and sense modes [15]. The trend of gyroscope development has been toward high integration density, which has been witnessed by many leading MEMS gyroscope manufacturers [1,4,7]
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