A microfluidic field-effect transistor biosensor with rolled-up indium nitride microtubes

Abstract

Field-effect-transistor (FET) biosensors capable of rapidly detecting disease-relevant biomarkers have long been considered as a promising tool for point-of-care (POC) diagnosis. Rolled-up nanotechnology, as a batch fabrication strategy for generating three-dimensional (3D) microtubes, has been demonstrated to possess unique advantages for constructing FET biosensors. In this paper, we report a new approach combining the two fascinating technologies, the FET biosensor and the rolled-up microtube, to develop a microfluidic diagnostic biosensor. We integrated an excellent biosensing III-nitride material—indium nitride (InN)—into a rolled-up microtube and used it as the FET channel. The InN possesses strong, intrinsic, and stable electron accumulation (~1013 cm−2) on its surface, thereby providing a high device sensitivity. Multiple rolled-up InN microtube FET biosensors fabricated on the same substrate were integrated with a microfluidic channel for convenient fluids handling, and shared the same external electrode (inserted into the microchannel outlet) for gating voltage modulation. Using human immunodeficiency virus (HIV) antibody as a model disease marker, we characterized the analytical performance of the developed biosensor and achieved a limit of detection (LOD) of 2.5 pM for serum samples spiked with HIV gp41 antibodies. The rolled-up InN microtube FET biosensor represents a new type of III-nitride-based FET biosensor and holds significant potential for practical POC diagnosis.