Abstract
This article is intended to design a static micro-force sensor with a simple structure employing the polymer material PVDF (polyvinylidene fluoride) film as its sensing element, and will carry out some micro-force tracking tests. During the tracking tests, this paper employs a Fuzzy-PID control method and an ordinary PD control method to control the system, and will also analyze the results of them.
Highlights
Force sensing technology has been developing rapidly in the field of industrial robot applications, and this technology could be used in micro-assembly and the cell-injection process
Due to the fact that the micro-force affects the successful rate of micro assembly and the survival rate of injected-cells directly[1], so a high sensitive static micro-force senor and its force-control system is in urgent need
In [4], Yantao Shen et al developed a high sensitive micro-force sensor based on PVDF, and applied it into erecting micro-mirrors
Summary
Force sensing technology has been developing rapidly in the field of industrial robot applications, and this technology could be used in micro-assembly and the cell-injection process. Due to the fact that the micro-force affects the successful rate of micro assembly and the survival rate of injected-cells directly[1], so a high sensitive static micro-force senor and its force-control system is in urgent need. Reference [4] and [5] employed PVDF films and some complicated physical circuits as their sensors, but the signal of them can not stay for a long time. This paper, based on the previous work, develops a static PVDF sensor employing the inverse-model algorithm with a simple physical circuit, and designs a Fuzzy-PID controller, uses them to complete one micro-force tracking test. According to our previous work [6], the transfer function of PVDF film shown in Fig. is Eq., and the one of the magnitude-changeable charge amplifier circuit shown in Fig. is Eq.. The linearity error of the static sensor is about 6%, and its resolution can reach μN level
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