Abstract
A system traceable to mass standard below 10-5N with high precision was proposed. An electrostatic force generator was adopted to produce micro force. The principle of the system was a cylindrical capacitor. The outer electrode served as the reference. A rectilinear flexure mechanism suspended and guided the inner electrode. The electrostatic force was generated by the voltage between electrodes so that mechanics quantity was linked to electrical capacity. The capacitor can be used in a balance mode to compare an electrostatic force with the calibrated nominal mass. The experiments show that the capacitance change gradient is 0.84pF/mm so as to realize the electrostatic force in the range of 10-6～10-9N.
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