Abstract
In this paper, we present a micro flow sensor from a polymer based on the thermal anemometric principle. A sensor with outer dimensions of 5.5 × 6 × 1.2 mm3 and a small fluidic channel with a cross-section of 240 µm × 400 µm may be operated with both gases (up to 200 ml min−1) and liquids (for water up to 200 µl min−1). Due to its small heat capacity, the sensor is also suitable for dynamical measurements of liquid flows, e.g. flow pulsations up to several 100 Hz even within high-pressure hydraulic systems.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
