Abstract
The measurement system based on optical interference has obvious advantages of high precision and high sensitivity. However, the signal is easy to be disturbed by vibration from environment, so the system needs to stay away from the vibration source. To use the optical interference method for real-time measurement, it has to im-prove the system’s stability. In this paper, we proposed an integrated Michelson interference device to measure the thicknesses of multiple layers of optical plate, which could improve the stability of the optical interference system in a new way. Through smart design and high precision processing technique, the light path of the structure was integrated into a whole, which could avoid disturbing successfully. Compared with fiber based interferometer, this device could bring obviously more stable signal. The thicknesses of the multiple layers of optical plate were measured to confirm its feasibility to do the real-time precision measurement.
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