A method for the identification of heat transfers on the surface of a material: Application to a plasma assisted chemical vapour deposition process

Abstract

In this paper, a method for the identification of heat transfers on the surface of a material is investigated. From an experimental situation (the elaboration of amorphous hydrogenated silicon carbide coatings with a Plasma Assisted Chemical Vapour Deposition PACVD process), a thermal system described by a set of non linear partial differential equations is considered. From temperature measurements, the thermal effect of a the plasma surrounding is identified. Several numerical aspects of the resolution of a such an inverse problem are presented.